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Effects of axial and residual stresses on thermoelastic damping in capacitive micro-beam resonators

EngineeringMicromechanicsMicrofabricationMechanicsMechanical EngineeringResidual StressesThermoelastic DampingCapacitive Micro-beam ResonatorsStructural MechanicsVibration ControlMechanics Of MaterialsMicro-electromechanical System