Near-field microwave microscope with improved sensitivity and spatial resolution

Abstract

The near-field scanning microwave microscope has become a popular instrument to quantitatively image high-frequency properties of metals and dielectrics on length scales far shorter than the wavelength of the radiation. We have developed several new ways to operate this microscope to dramatically improve its spatial resolution and material property sensitivity. These include a novel distance-following method that takes advantage of the stability of a synthesized microwave source to improve the signal-to-noise ratio of our earlier frequency-following imaging technique. We also discuss novel height-modulated imaging techniques, culminating in a new tapping-mode method, which makes a 14 dB improvement in sensitivity, a 17.5 dB improvement in signal-to-noise ratio, and a factor of 2.3 improvement in spatial resolution compared to distance-following imaging.