Publication | Closed Access
A model for the ?100? crystallographic tunnel etching of aluminium
17
Citations
10
References
1996
Year
Materials ScienceMaterials EngineeringAluminium NitrideEngineeringTunneling MicroscopyCrystallographic Tunnel EtchingElectron-beam LithographySurface ScienceApplied PhysicsMechanical EngineeringMicroelectronicsPlasma EtchingMicrostructureMetallography
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