Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask - Concepedia

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Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask

DOI Full Paper Access

10

Citations

18

References

2009

Year

Antoine Barnabé, M. Lalanne, Lionel Presmanes, Jia Mei Soon, Philippe Tailhades, C. Dumas, J. Grisolia, Arnaud Arbouet, Vincent Paillard, G. Benassayag,

Thin Solid Films

Materials ScienceMaterials EngineeringElectrical EngineeringNon-reactive Rf MagnetronEngineeringMicrofabricationNanoelectronicsNanotechnologyOxide ElectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsZno-based ContactsThin Film ProcessingStencil Mask

References

	Year	Citations

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