Publication | Closed Access
Molecular beam epitaxy and metalorganic chemical vapor deposition growth of epitaxial CdTe on (100) GaAs/Si and (111) GaAs/Si substrates
17
Citations
16
References
1988
Year
Materials ScienceIi-vi SemiconductorElectrical EngineeringGaas/si SubstratesEngineeringElectron MicroscopyNanoelectronicsApplied PhysicsCdte FilmMolecular Beam EpitaxyChemical Vapor DepositionEpitaxial GrowthOptoelectronicsEpitaxial CdteCompound Semiconductor
Epitaxial CdTe has been grown on both (100)GaAs/Si and (111)GaAs/Si substrates. A combination of molecular beam epitaxy (MBE) and metalorganic chemical vapor deposition (MOCVD) has been employed for the first time to achieve this growth: the GaAs layers are grown on Si substrates by MBE and the CdTe film is subsequently deposited on GaAs/Si by MOCVD. The grown layers have been characterized by x-ray diffraction, scanning electron microscopy, and photoluminescence.
| Year | Citations | |
|---|---|---|
Page 1
Page 1