Publication | Closed Access
Superhard nanocomposite Ti–Al–Si–N films deposited by reactive unbalanced magnetron sputtering
92
Citations
33
References
2006
Year
Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringNanotechnologyApplied PhysicsThin Film Process TechnologyThin FilmsChemical Vapor DepositionThin Film Processing
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