Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films

Abstract

Single-mode optical rib waveguides operating at telecommunication wavelengths are successfully patterned via a hot embossing technique in a thermally evaporated chalcogenide glass thin film on a chalcogenide glass substrate. Ellipsometry is used to measure the refractive index dispersion of the pressed film (As(40)Se(60)) and substrate (Ge(17)As(18)Se(65)).