Composition control of manganite perovskites in metalorganic chemical vapor deposition with <i>in situ</i> spectroscopic monitoring

Abstract

Using in situ infrared absorption spectroscopy, the behavior of the film precursors, tris(dipivaloylmethanato)lanthanum [La(DPM)3], tris(dipivaloylmethanato)manganese [Mn(DPM)3], and bis(dipivaloylmethanato)strontium [Sr(DPM)2], in the gas phase was investigated under actual chemical vapor deposition conditions of manganite perovskites. The temperature dependence of the infrared absorption indicates that La(DPM)3, Mn(DPM)3, and Sr(DPM)2 differ significantly in the decomposition temperature. The atomic composition of the deposited film can be controlled on the basis of the precursor densities obtained by the in situ spectroscopic measurements. The composition control based on the in situ monitoring technique is expected to improve the reproducibility of the magnetic property of the deposited film.