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The influence of CH4 addition on composition, structure and optical characteristics of SiCN thin films deposited in a CH4/N2/Ar/hexamethyldisilazane microwave plasma

DOI

36

Citations

48

References

2011

Year

Simon Bulou, L. Le Brizoual, Patrice Miska, Ludovic de Poucques, R. Hugon, M. Belmahi, J. Bougdira
Thin Solid Films

References

YearCitations

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