Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology - Concepedia

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Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology

70

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0

References

2001

Year

D.J.W. Klunder, E. Krioukov, F.S. Tan, T. van der Veen, H.F. Bulthuis, G. Sengo, Cornelis Otto, H.J.W.M. Hoekstra, A. Driessen

Applied Physics B

PhotonicsEngineeringMicrofabricationSilicon On InsulatorApplied PhysicsSio2 TechnologyPlanar Waveguide SensorMicro-optical ComponentMicro-electromechanical SystemWaveguide-coupled Cylindrical MicroresonatorsNanophotonics

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