Thin Solid Films · 2001 · 30 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsMaterials PhysicsThin FilmsResidual StressSemiconductor PhysicsThin Film AnnealingThin Film Mechanical PropertiesThin Film StrainAnnealing EffectsAnnealing Temperature EffectsFilm StressStrain RelaxationStress Relaxation Mechanisms
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Phase control of cubic boron nitride thin films
Daniel J. Kester, R. Messier · Journal of Applied Physics · 1992 · 352 citations