Surface OH groups governing surface chemical properties of SiO2 thin films deposited by RF magnetron sputtering - Concepedia

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Surface OH groups governing surface chemical properties of SiO2 thin films deposited by RF magnetron sputtering

36

Citations

15

References

2003

Year

Satoshi Takeda, Makoto Fukawa

Thin Solid Films

Materials ScienceSurface CharacterizationEngineeringNanoelectronicsSurface ScienceApplied PhysicsSurface Oh GroupsSurface Chemical PropertiesThin FilmsSilicon On InsulatorMicroelectronicsThin Film ProcessingSio2 Thin Films

References

	Year	Citations

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