Concepedia

Publication | Closed Access

Silicon precursor development for advanced dielectric barriers for VLSI technology

DOI

27

Citations

3

References

2011

Year

Anupama Mallikarjunan, Andrew D. Johnson, Laura M. Matz, Raymond N. Vrtis, Agnes Derecskei‐Kovacs, Xuezhong Jiang, Manchao Xiao
Microelectronic Engineering

References

YearCitations

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