Influence of Nonequilibrium Ionization Process on the Efficiency of a Plasma Discharge Xenon Source

Abstract

In connection with fast plasma heating in capillary discharges, the transient ionization effect on the plasma conversion efficiency of 4d8-4d75p transitions (λ ≈ 13.5 nm) of xenon has been theoretically investigated. Results indicate that ion abundance is a function of the history of plasma evolution, and the fast heating process produces higher conversion efficiency values compared with the steady-state plasma.