Publication | Closed Access
Pulsed laser deposition of piezoelectric ZnO thin films for bulk acoustic wave devices
52
Citations
28
References
2013
Year
Materials ScienceEngineeringApplied PhysicsLaser UltrasoundLaser DepositionPulsed Laser DepositionPiezoelectricityPiezoelectric MaterialUltrasoundThin FilmsMicromachined Ultrasonic Transducer
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