A novel SiNW/CMOS hybrid biosensor for high sensitivity/low noise

Abstract

A novel silicon nanowire (SiNW)/CMOS hybrid biosensor was produced for the first time. The hybrid biosensor features a complementary SiNW block and CMOS logic inverter readout circuitry. The proposed hybrid biosensor shows remarkably sensitive output voltage (Δ1.2 V/Δ0.4 pH and Δ1.2 V/Δ200 fM DNA) without noise or fluctuations.