Concepedia

Preparation and properties of tantalum thin films

P.N. Baker

Thin Solid Films · 1972 · 92 citations · 52 references

DOI

Concepts

References

52

Thin Film Phenomena

K. L. Chopra, Julius Klerrer · Journal of The Electrochemical Society · 1970 · 2K citations

Measurement of Sheet Resistivities with the Four-Point Probe

F. M. Smits · Bell System Technical Journal · 1958 · 1.6K citations

, , +16

Vacuum Deposition of Thin Films

L. Holland, Joseph Greenspan · Journal of The Electrochemical Society · 1957 · 861 citations

, , +11

Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

N. Laegreid, G. K. Wehner · Journal of Applied Physics · 1961 · 807 citations

, , +13

Sputtering Yields for Low Energy He+-, Kr+-, and Xe+-Ion Bombardment

Duane Rosenberg, G. K. Wehner · Journal of Applied Physics · 1962 · 431 citations

, , +5