Concepedia

Comment on Fractal Aggregates in Sputter-Deposited Films

D. T. Smith, J. M. Valles, R. B. Hallock

Physical Review Letters · 1985 · 13 citations · 0 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSurface ScienceThin FilmsSurface RoughnessThin Film AdhesionThin Film Surface MorphologyThin-film DepositionThin-film MaterialsFilm MorphologyFractal DimensionSputter DepositionSputteringSputtering Processes