High conductivity and transparent ZnO:Al films prepared at low temperature by DC and MF magnetron sputtering - Concepedia

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High conductivity and transparent ZnO:Al films prepared at low temperature by DC and MF magnetron sputtering

87

Citations

13

References

2006

Year

C. Guillén, J. Herrero

Thin Solid Films

Materials EngineeringMaterials ScienceAluminium NitrideHigh ConductivityEngineeringOxide ElectronicsApplied PhysicsAl FilmsGallium OxideThin FilmsTransparent ZnoThin Film Processing

References

	Year	Citations

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