Concepedia

Publication | Closed Access

A new microstructured silicon substrate for ultrathin gas-sensitive films

DOI

17

Citations

2

References

1993

Year

Andreas Schütze, U. Weber, J. Zacheja, D. Köhl, W. Mokwa, M. Rospert, J. Werno
Sensors and Actuators A Physical

References

YearCitations

Page 1