Measurements of Diffusion Coefficient of CF₂ Radical in DC Pulsed CF₄ Discharge Plasma

Abstract

Laser-induced fluorescence has been used to measure the CF 2 radical ground-state densities after extinction of DC pulsed CF 4 discharge plasma. From the measurement, the CF 2 radical was shown to be removed mainly by a diffusion process. Its diffusion coefficient was found to be D =65 cm 2 ·Torr·s -1 in CF 4 at room temperature.