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Growth of ZnO/sapphire heteroepitaxial thin films by radio-frequency sputtering with a raw powder target

Materials ScienceEngineeringRadio-frequency SputteringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsRaw Powder TargetGallium OxideThin FilmsPulsed Laser DepositionThin Film Processing