Publication | Open Access

Phase transformation in SiOx/SiO2 multilayers for optoelectronics and microelectronics applications

Materials ScienceElectrical EngineeringEngineeringNanotechnologySurface ScienceApplied PhysicsPhase TransformationSiliceneMultilayer HeterostructuresSemiconductor Device FabricationSilicon On InsulatorMicroelectronics