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A new method for determining relaxation energies by means of aes and xps and its application to silicon compounds

Relaxation ProcessElectrical EngineeringEngineeringPhysicsNatural SciencesApplied PhysicsPhysical ChemistrySemiconductor MaterialQuantum ChemistrySilicon On InsulatorMicroelectronicsElectronic StructureNew MethodRelaxation Energies