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An analytical model of a silicon MEMS vaporizing liquid microthruster and some experimental studies

EngineeringMicrofabricationAnalytical ModelMechanical EngineeringApplied PhysicsSilicon MemsMicroscale SystemThermodynamicsHeat TransferMultiphase FlowMicrofluidicsLiquid MicrothrusterSilicon On InsulatorMicro-electromechanical SystemMicroelectronics