Kinetic Roughness of Amorphous Multilayers Studied by Diffuse X-Ray Scattering

Abstract

We apply the scattering geometry of grazing incidence and exit angles to study the diffuse scattering of an amorphous, magnetron sputtered W/Si multilayer. Only this technique allows for the full range of parallel momentum transfer necessary to determine the height-height self- and cross-correlation functions from the structure factor of the rough interfaces and the exit-angle-resolved intensity, respectively. The self-correlation functions show the logarithmic scaling behavior predicted by the Edwards-Wilkinson Langevin equation, which describes the kinetic roughening of a growing surface. The cross-correlation functions also agree with those derived from the equation.