Lattice locations of erbium implants in silicon - Concepedia

Concepedia

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Lattice locations of erbium implants in silicon

48

Citations

4

References

1989

Year

Y. S. Tang, Zhang Jingping, KC Heasman, B.J. Sealy

Solid State Communications

Materials ScienceMaterials EngineeringEngineeringCondensed Matter PhysicsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsErbium Implants

References

	Year	Citations

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