Concepedia

Publication | Closed Access

Characterization and production metrology of gate dielectric films

DOI

12

Citations

5

References

2001

Year

Alain C. Diebold, Jesse D. Canterbury, Will Chism, Curt A. Richter, Nhan V. Nguyen, Jim Ehrstein, C. Weintraub
Materials Science in Semiconductor Processing

References

YearCitations

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