Internal stress of chemical vapour deposition diamond film on silicon - Concepedia

Concepedia

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Internal stress of chemical vapour deposition diamond film on silicon

16

Citations

13

References

1994

Year

Yan-Kai Chiou, Chian-Liang Hwang, Min-Yung Han, Jwo‐Huei Jou, Yoon Soo Chang, H.C. Shih

Thin Solid Films

Materials ScienceDiamond-like CarbonEngineeringDeposition Diamond FilmSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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