Thin Solid Films · 1986 · 31 citations · 18 references
Natural SciencesMaterials SciencePhysicsElectronic MaterialsPlasma PhysicsThin FilmsDielectricsHigh-temperature PlasmasPlasma FundamentalsPlasma-surface InteractionsPolymer Thin FilmsThin Film Electrical PropertiesGlow DischargesPlasma PolymerizationPlasma Treatment Of PolymersPolymer Dielectrics
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