Study of discharge characteristics in pure argon and oxygen during dc sputtering of YBaCuO films

G.K. Muralidhar, G. Mohan Rao, M. Ghanashyam Krishna, K. Narasimha Rao, AG Menon, T.V. Balasubramanian, S. Mohan

Vacuum · 1993 · 10 citations · 8 references

Concepts

References

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