Publication | Closed Access
Study of discharge characteristics in pure argon and oxygen during dc sputtering of YBaCuO films
10
Citations
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References
1993
Year
Materials ScienceElectrical EngineeringEngineeringOxide ElectronicsGlow DischargeApplied PhysicsSuperconductivityPure ArgonYbacuo FilmsDc SputteringGas Discharge PlasmaThin Film ProcessingElectrical Insulation
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