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Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering

Materials ScienceMaterials EngineeringElectrical EngineeringOptical MaterialsEngineeringAluminium NitrideOptical PropertiesOxide ElectronicsApplied PhysicsGallium OxideRadio Frequency MagnetronThin FilmsOptoelectronicsThin Film ProcessingAl-doped Zno Films