Portable x-ray fluorescence spectrometer for coating thickness measurement

Abstract

A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1-1500 nm in an industrial environment. Accuracy of approximately 3% has been achieved in this range with a measurement time of 1 min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used.