Effects of r.f. bias and nitrogen flow rates on the reactive sputtering of TiA1N films - Concepedia

Concepedia

Publication | Closed Access

Effects of r.f. bias and nitrogen flow rates on the reactive sputtering of TiA1N films

54

Citations

33

References

1997

Year

Bor‐Yuan Shew, Jow-Lay Huang, Ding‐Fwu Lii

Thin Solid Films

Materials EngineeringMaterials ScienceNitrogen Flow RatesEngineeringNanoelectronicsSurface ScienceApplied PhysicsReactive SputteringThin FilmsChemical Vapor DepositionThin Film ProcessingTia1n Films

References

	Year	Citations

Page 1