Publication | Closed Access
nm-Co2Si, CoSi and CoSi2 silicide films from the single source precursor CoSiCl3(CO)4 in the presence of SiH4
27
Citations
15
References
2000
Year
Materials ScienceMolecular SieveEngineeringSurface ScienceSiliceneChemistrySilicon On InsulatorChemical Vapor Deposition
| Year | Citations | |
|---|---|---|
Page 1
Page 1