Publication | Closed Access
LILIT beamline for soft and deep X-ray lithography at Elettra
26
Citations
7
References
2001
Year
Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationLilit BeamlineX-ray DiffractionApplied PhysicsSynchrotron RadiationX-ray OpticSynchrotron Radiation Source3D PrintingX-ray Imaging
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