47.2: 2.8‐inch WQVGA Flexible AMOLED Using High Performance Low Temperature Polysilicon TFT on Plastic Substrates

Abstract

Abstract This paper reports a low‐temperature polycrystalline silicon (LTPS) fabrication process on plastic substrate for a flexible AMOLED display. Characteristics of fabricated TFTs showed excellent performance with field effect mobility of 124.1 cm 2 /V‐s, on/off ratio of >10 8 , subthreshold slope of 0.30V/dec, and threshold voltage of −2.03V. Internal scan drive circuits, 1:3 demux, and compensation circuits were successfully integrated on the backplane of a 166ppi 2.8″ WQVGA flexible AMOLED panel.