Concepedia

Publication | Closed Access

Nitrogen profiles of thin sputtered PVD silicon nitride films

DOI

23

Citations

14

References

1993

Year

A. Markwitz, H. Baumann, E. F. Krimmel, M.J. Rose, P. Misaelides, S. Logothetidis
Vacuum

References

YearCitations

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