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Process of Applying Al2O3 Coatings in Microchannels of Completely Manufactured Microstructured Reactors

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References

2002

Year

Abstract

The methods presented allow vacuum-tight microstructured components to be produced, in which the microchannel walls are provided with aluminum oxide coatings. These coatings have a large surface area and may be applied as catalyst carriers for heterogeneously catalyzed reactions, as was demonstrated by the catalytic conversion of hydrogen with oxygen.