A comparison of ns and ps steam laser cleaning of Si surfaces - Concepedia

Concepedia

Publication | Open Access

A comparison of ns and ps steam laser cleaning of Si surfaces

DOI Full Paper Access

43

Citations

0

References

1999

Year

M. Mosbacher, N. Chaoui, Jan Siegel, V. Dobler, Johannes Boneberg, C. N. Afonso, P. Leǐderer

Applied Physics A

Materials ScienceEngineeringMicrofabricationSurface ScienceApplied PhysicsLaser ApplicationsLaser Processing TechnologyLaser-assisted DepositionSi SurfacesPulsed Laser DepositionLaser-surface InteractionsSurface Processing

No additional data available for this publication yet. Check back later!