Mechanical properties and phase structure of (TiAlZr)N films deposited by multi arc ion plating - Concepedia

Concepedia

Publication | Closed Access

Mechanical properties and phase structure of (TiAlZr)N films deposited by multi arc ion plating

19

Citations

21

References

2009

Year

Zhang Jun, Wenying Guo, Yu Zhang, Qiang Guo, Chuang Wang, Lipeng Zhang

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsSurface ScienceN FilmsThin FilmsThin Film ProcessingPlasma EtchingChemical Vapor DepositionDepth-graded Multilayer CoatingMicrostructureMulti Arc Ion

References

	Year	Citations

Page 1

Page 1