A new model of the thermal growth of a silicon dioxide layer

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Permeation of Gaseous Oxygen through Vitreous Silica

Francis J. Norton · Nature · 1961 · 317 citations · Full text

Engineering, Materials Engineering, Materials Science +6

Effect of an Electric Field on Silicon Oxidation

Paul J. Jorgensen · The Journal of Chemical Physics · 1962 · 189 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thermal Oxidation of Silicon: In Situ Measurement of the Growth Rate Using Ellipsometry

M. A. Hopper, R. Allyn Clarke, L. Young · Journal of The Electrochemical Society · 1975 · 149 citations

Natural Sciences, Materials Engineering, Materials Science +17

The mechanisms for silicon oxidation in steam and oxygen

J. R. Ligenza, W. G. Spitzer · Journal of Physics and Chemistry of Solids · 1960 · 117 citations

Natural Sciences, Chemistry, Materials Science +12