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Design considerations on large amplitude vibration of a doubly clamped microresonator with two symmetrically located electrodes

EngineeringMicrofabricationDesign ConsiderationsMechanical EngineeringLarge Amplitude VibrationNano Electro Mechanical SystemMicroactuatorVibration ControlMicro-electromechanical SystemMicromachined Ultrasonic Transducer