Publication | Closed Access
Properties of Al heavy-doped ZnO thin films by RF magnetron sputtering
55
Citations
14
References
2007
Year
Materials EngineeringMaterials ScienceAluminium NitrideEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsRf MagnetronGallium OxideThin FilmsThin Film Processing
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