Concepedia

Publication | Closed Access

Lateral implantation dose measurements of plasma immersion ion implanted non-planar samples

DOI

21

Citations

13

References

1996

Year

Jana Hartmann, Wolfgang Ensinger, R. Thomae, H. Bender, A. Königer, B. Stritzker, B. Rauschenbach
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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