Optimized binary, phase-only, diffractive optical element with subwavelength features for 155 μm

Abstract

We report the use of rigorous coupled-wave diffraction analysis in conjunction with the simulated annealing optimization method for performing optimal design of binary-level surface-relief diffractive elements with subwavelength, submicrometer features that exhibit quasi-linear-phase transmittance. An element designed for operation at 1.55 μm has been fabricated and is characterized.