Optimized gradient-free PZT thin films for micro-actuators

Abstract

For its outstanding piezoelectric coefficients, thin-film sol-gel Pb(Zr <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.52,</sub> Ti <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.48</sub> )O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> (PZT) has been widely studied over the past few decades. In particular, the impact of Zr/Ti ratio control on e <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">31,eff</sub> coefficient has been investigated at low fields. Yet, when it comes to actuation, PZT films are used with electric fields higher than the coercive field. In this paper, the influence of Zr/Ti gradient reduction on e <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">31,eff</sub> coefficient is investigated in actuating conditions, ie under high fields.