Publication | Closed Access
Study of HfO2 films prepared by ion-assisted deposition using a gridless end-hall ion source
94
Citations
10
References
1999
Year
Materials ScienceMaterials EngineeringHfo2 FilmsEngineeringIon-assisted DepositionSurface ScienceApplied PhysicsVacuum DeviceHydrogenChemical DepositionMolecular Beam EpitaxyPlasma ProcessingChemical Vapor Deposition
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