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Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique

Materials ScienceMaterials EngineeringElectrical EngineeringCarbon FilmsEngineeringCarbon-based MaterialDiamond-like CarbonHexagonal Boron NitrideNanoelectronicsMagnetron Sputtering TechniqueCubic Boron NitrideApplied PhysicsSilicon DopingBoron NitrideCarbon-based Films