Science · 1990 · 222 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramicsElectronic MaterialsThin FilmsElectrical Properties Of CeramicsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film MaterialsCeramic Thin FilmsComplex OxidesElectrical CeramicsHardnessSemiconductor TechnologyThin Film CeramicsThin Oxide FilmsThin-film Oxides
Ceramics are a distinct class ofmaterials whose properties range from extreme hardness to unique electrical behavior. New methods of creating thin films of complex oxides and electronic ceramics allow the integration of these properties with semiconductor technology and raise the possibility of a new range of electronic devices.
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